Product Features:

Low noise

Integrated control system enabling unattended operation and remote control

Wide operating range with no speed (here refers to pumping speed) attenuation within the range of 10Pa~10^5Pa

Typical Applications:
Microelectronics, semiconductor, lithium battery industry, photovoltaic industry, space simulation, metallurgical systems, coating,

Plasma processes, process gas extraction, electronic processing, biotechnology/pharmaceuticals, chemical industry, etc